考虑测头误差补偿策略的光学元件接触式在位检测研究（特邀）

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Publication Details

Journal
Infrared and Laser Engineering
Published
2025-01-01
DOI
https://doi.org/10.3788/irla20250299
Primary Topic
Advanced Surface Polishing Techniques
Type
article
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article

考虑测头误差补偿策略的光学元件接触式在位检测研究（特邀）

杨平 Yang Ping, 郑永斌 ZHENG Yongbin, 张凯 ZHANG Kai, 黄沛知 HUANG Peizhi et al.
Infrared and Laser Engineering
Advanced Surface Polishing Techniques
article

考虑测头误差补偿策略的光学元件接触式在位检测研究（特邀）

杨平 Yang Ping, 郑永斌 ZHENG Yongbin, 张凯 ZHANG Kai, 黄沛知 HUANG Peizhi, 黄林斌 HUANG Linbin, 彭云峰 PENG Yunfeng
article en

Abstract

No abstract available for this paper.
Infrared and Laser EngineeringVol. 54(9)
Openalex Percentile: Top 61%
Advanced Surface Polishing Techniques
DOISourceOpenAlex
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考虑测头误差补偿策略的光学元件接触式在位检测研究（特邀） — 杨平 Yang Ping, 郑永斌 ZHENG Yongbin, et al. · Infrared and Laser Engineering (2025) | TGRS Research Map | TGRS