聚氨酯抛光垫特性对化学机械抛光性能的影响研究进展（特邀）

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Publication Details

Journal
Infrared and Laser Engineering
Published
2025-01-01
DOI
https://doi.org/10.3788/irla20250336
Primary Topic
Advanced Surface Polishing Techniques
Type
article
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article

聚氨酯抛光垫特性对化学机械抛光性能的影响研究进展（特邀）

侯长余 HOU Changyu, 吴涛 WU Tao, 李凯强 LI Kaiqiang, 周平 ZHOU Ping et al.
Infrared and Laser Engineering
Advanced Surface Polishing Techniques
article

聚氨酯抛光垫特性对化学机械抛光性能的影响研究进展（特邀）

侯长余 HOU Changyu, 吴涛 WU Tao, 李凯强 LI Kaiqiang, 周平 ZHOU Ping, 郭东明 GUO Dongming
article en

Abstract

No abstract available for this paper.
Infrared and Laser EngineeringVol. 54(9)
Openalex Percentile: Top 61%
Advanced Surface Polishing Techniques
DOISourceOpenAlex
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聚氨酯抛光垫特性对化学机械抛光性能的影响研究进展（特邀） — 侯长余 HOU Changyu, 吴涛 WU Tao, et al. · Infrared and Laser Engineering (2025) | TGRS Research Map | TGRS