Modification of adhesion between microparticles and engineered silicon surfaces

A key challenge in performing experiments with microparticles is controlling their adhesion to substrates. For example, levitation of a microparticle initially resting on a surface requires overcoming the surface adhesion forces to deliver the microparticle into a mechanical potential acting as a trap. By engineering the surface of silicon substrates, we aim to decrease the adhesion force between a metallic microparticle and the silicon surface. To this end, we investigate different methods of surface engineering that are based on chemical, physical, or physio-chemical modifications of the surface of silicon. We give quantitative results on the detachment force, finding a correlation between the water contact angle and the mean detachment force, indicating that hydrophobic surfaces are desired for low microparticle adhesion. We develop surface preparations decreasing the mean detachment force by more than a factor of three compared to an untreated silicon surface. Our results will enable reliable levitation of microparticles and are relevant for experiments requiring low adhesion between microparticles and a surface.