Invited Article: High-quality blazed gratings through synergy between e-beam lithography and robust characterization techniques
Maintaining the highest quality and output of photon science in the VUV-, EUV-, soft-, and tender-x-ray energy ranges requires high-quality blazed profile gratings. Currently, their availability is critical due to technological challenges and limited manufacturing resources. In this work, we show the developed method for manufacturing blazed gratings relevant for synchrotron-based science by means of electron-beam lithography (EBL). We investigate different parameters influencing the optical performance of blazed profile gratings and develop a robust process for the manufacturing of high-quality blazed gratings using polymethyl methacrylate as a high resolution positive tone resist and ion beam etching. Finally, we demonstrate excellent agreement in efficiency between the produced EBL grating and the theoretical prediction.
Authors
- Christian Dávid (ORCID: https://orcid.org/0000-0002-2953-1265)
- Nazanin Samadi (ORCID: https://orcid.org/0000-0002-7487-4021)
- Stefan Rehbein (ORCID: https://orcid.org/0000-0002-1606-1428)
- Analía Fernández Herrero (ORCID: https://orcid.org/0000-0003-4804-5999)
- Grzegorz Gwalt (ORCID: https://orcid.org/0000-0001-7608-4296)
- Bas Ketelaars
- Frank Siewert (ORCID: https://orcid.org/0000-0003-3810-3980)
- Thomas Krist (ORCID: https://orcid.org/0009-0008-7270-0635)
- Andréy Sokolov (ORCID: https://orcid.org/0000-0002-1562-7733)
- A. Teichert
- Christiaan Zonnevylle (ORCID: https://orcid.org/0009-0002-9759-1515)
Institutions
- Physikalisch-Technische Bundesanstalt (DE)
- Bechtel (United States) (US)
- Helmholtz-Zentrum Berlin für Materialien und Energie (DE)
- Deutsches Elektronen-Synchrotron DESY (DE)
- Paul Scherrer Institute (CH)
- Instituto de Óptica "Daza de Valdés" (ES)
Publication Details
- Journal
- Review of Scientific Instruments
- Published
- 2025-12-01
- DOI
- https://doi.org/10.1063/5.0293947
- Citations
- 1
- Primary Topic
- Advanced X-ray Imaging Techniques
- Type
- article
- Field-Weighted Citation Impact
- 1.88
Funders
- European Commission