Monolithic integration of metalens on III–V photodetectors for enhanced sensing

Short-wave infrared (SWIR) detectors hold significant application potential in fields, such as optical communications, low-light night vision, and LiDAR. In recent years, SWIR detectors have been advancing toward higher integration, enhanced sensitivity, miniaturization, and lower power consumption. Utilizing the precise control of optical wavefront phase and amplitude by metasurfaces enables efficient light focusing. This work proposes a scheme for the direct on-chip integration of a solid-immersion metalens with an InGaAs/InP PIN infrared detector. The integrated metalens-enhanced detector achieves a 2.4-fold improvement in responsivity compared to the detectors without metalens within the communication band and yields a specific detectivity of 2.37 × 1011 cm Hz1/2/W. This approach significantly enhances detector responsivity without introducing additional dark current or capacitance, thereby paving the way for the development of highly sensitive and miniaturized infrared detectors.

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Publication Details

Journal
APL Photonics
Published
2025-12-01
DOI
https://doi.org/10.1063/5.0301876
Primary Topic
Metamaterials and Metasurfaces Applications
Type
article
Field-Weighted Citation Impact
0.00

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article

Monolithic integration of metalens on III–V photodetectors for enhanced sensing

Zhen Deng, Chunhua Du, Jiaxin Yue, Yang Jiang et al.
APL Photonics
Metamaterials and Metasurfaces Applications
article

Monolithic integration of metalens on III–V photodetectors for enhanced sensing

Zhen Deng, Chunhua Du, Jiaxin Yue, Yang Jiang, Haiqiang Jia, Wenxin Wang, Hong Chen, Jiale Liu, Zhongshan Zhang, Fanlong Meng, Renjie Wen, Le Qin, Jinyu Zhang
article en

Abstract

Short-wave infrared (SWIR) detectors hold significant application potential in fields, such as optical communications, low-light night vision, and LiDAR. In recent years, SWIR detectors have been advancing toward higher integration, enhanced sensitivity, miniaturization, and lower power consumption. Utilizing the precise control of optical wavefront phase and amplitude by metasurfaces enables efficient light focusing. This work proposes a scheme for the direct on-chip integration of a solid-immersion metalens with an InGaAs/InP PIN infrared detector. The integrated metalens-enhanced detector achieves a 2.4-fold improvement in responsivity compared to the detectors without metalens within the communication band and yields a specific detectivity of 2.37 × 1011 cm Hz1/2/W. This approach significantly enhances detector responsivity without introducing additional dark current or capacitance, thereby paving the way for the development of highly sensitive and miniaturized infrared detectors.

APL PhotonicsVol. 10(12)
Chinese Academy of Sciences (CN), Beijing National Laboratory for Molecular Sciences (CN), Institute of Physics (CN), University of Chinese Academy of Sciences (CN)
National Natural Science Foundation of China, Chinese Academy of Sciences, Youth Innovation Promotion Association of the Chinese Academy of Sciences, National Key Research and Development Program of China, Youth Innovation Promotion Association
Openalex Percentile: Top 72%
Metamaterials and Metasurfaces Applications
DOIOpen Access PDFOpenAlex
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