Enhanced-resolution line-scan confocal microscopy via parallel pixel reassignment

This Letter proposes an Orthogonal Multi-Line Pixel Reassignment (OML-PR) method based on a digital micromirror device (DMD) to overcome the tradeoff between resolution and imaging speed in confocal microscopy. By generating high-density orthogonal multi-line-structured illumination via the DMD for parallel lateral scanning, combined with a 3D coordinated continuous axial scanning strategy, the method greatly enhances the acquisition efficiency. Artifact-free isotropic resolution enhancement is achieved via a gradient-guided reassignment mechanism. Experimental results demonstrate a lateral resolution of 137 nm using a 100×/0.90 NA objective at a wavelength of 455 nm, clearly detecting 98 nm gap defects and 48 nm bridge defects. A full 3D scan is completed in less than 3 seconds, markedly enhancing the reconstruction quality and inspection efficiency for micro-nano structure topography.