Microfabricated multi-axis cell for integrated atomic devices

Abstract Microfabricated alkali vapor cells enable the miniaturization of atomic sensors, but require collective wafer-level integration of complex features. In many applications-including magnetometers, gyroscopes, magneto-optical traps, and fluorescence imaging-multiple optical accesses are needed to enhance performance. Yet, achieving this without compromising manufacturability remains challenging. In this work, we present a wafer-level fabrication approach that enables three orthogonal optical pathways in microfabricated alkali vapor cells, using fully scalable and collective processes. Our method relies on the thermal reflow of glass preforms, shaped by laser-assisted etching (LAE) and bonded between silicon frames. The relatively low surface roughness produced by LAE allows for effective reflow, which further smooths the surfaces without significantly compromising the optical planarity of the windows. This process results in multi-axis vapor cells featuring embedded, optics-grade lateral windows. We evaluate the device performance through both single-beam and dual-beam atomic magnetometry measurements. Magnetic sensitivities better than <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" overflow="scroll"> <mml:mrow> <mml:mn>200</mml:mn> <mml:mstyle scriptlevel="0"/> <mml:mrow> <mml:mi>fT</mml:mi> </mml:mrow> <mml:msqrt> <mml:msup> <mml:mrow> <mml:mi>Hz</mml:mi> </mml:mrow> <mml:mrow> <mml:mo>−</mml:mo> <mml:mn>1</mml:mn> </mml:mrow> </mml:msup> </mml:msqrt> </mml:mrow> </mml:math> are demonstrated along each of the three orthogonal axes, confirming the potential of the approach for tri-axis magnetic field sensing at sub-picotesla resolution. This fabrication strategy opens new perspectives for versatile, high-performance atomic sensors, fully compatible with wafer-level integration and mass production.