Pulsed Laser Deposited $\alpha$-MoO3 Thin Films for Mid-Infrared Photonic Applications

Alpha-phase molybdenum trioxide (<tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\alpha-\text{MoO}_{3}$</tex>) has recently attracted much attention in the nanophotonics community because of its strong ability to excite surface phonon polaritons (SPhPs), exploitable in many applications ranging from the sensing of biomolecules to the realization of polarizers and filters in the mid-infrared. In this paper, we report on fabrication, characterization and optimization of alpha-phase <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{MoO}_{3}$</tex> thin films grown by pulsed laser deposition. Different process conditions were tested through structural and optical characterization to obtain the most suitable films for mid-infrared photonic applications.

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Published
2025-09-09
DOI
https://doi.org/10.1109/ogc66041.2025.11262102
Primary Topic
Transition Metal Oxide Nanomaterials
Type
article
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article

Pulsed Laser Deposited $\alpha$-MoO3 Thin Films for Mid-Infrared Photonic Applications

Maria Pia Casaletto, I. Crupi, Roberto Macaluso, Federico Vittorio Lupo et al.
Transition Metal Oxide Nanomaterials
article

Pulsed Laser Deposited $\alpha$-MoO3 Thin Films for Mid-Infrared Photonic Applications

Maria Pia Casaletto, I. Crupi, Roberto Macaluso, Federico Vittorio Lupo, Martina Mercurio, Daniele Ceneda, Maria Cristina Larciprete, Mauro Mosca, Marco Centini, Dominique Persano Adorno, Nunzio Timpanaro Pirrina
article en

Abstract

Alpha-phase molybdenum trioxide (<tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\alpha-\text{MoO}_{3}$</tex>) has recently attracted much attention in the nanophotonics community because of its strong ability to excite surface phonon polaritons (SPhPs), exploitable in many applications ranging from the sensing of biomolecules to the realization of polarizers and filters in the mid-infrared. In this paper, we report on fabrication, characterization and optimization of alpha-phase <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{MoO}_{3}$</tex> thin films grown by pulsed laser deposition. Different process conditions were tested through structural and optical characterization to obtain the most suitable films for mid-infrared photonic applications.

Institute of Nanostructured Materials (IT), Sapienza University of Rome (IT), University of Palermo (IT)
Openalex Percentile: Top 66%
Transition Metal Oxide Nanomaterials
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