A differential MEMS resonant voltmeter based on multi-mode operation

Traditional differential MEMS resonant voltmeters typically employ two structures of identical size to achieve accurate differentiation; however, the mode localization effect may result in the generation of a measurement dead zone. This article novelly drives one resonator to operate in the first-order mode and the other resonator to operate in the second-order mode, based on the traditional differential architecture. It then utilises the proportional difference form to suppress the temperature effect, thereby fundamentally avoiding the problem of measurement dead zone. The experimental results show that the differential MEMS resonant voltmeter operates in a multi-mode, improving resolution while suppressing the temperature effect. This method can also be applied to other types of MEMS resonant sensors.