Water-Soluble GeO <sub>2</sub> -Transferred Ultrathin PI/MnCo <sub>2</sub> O <sub>4</sub> /Ta <sub>2</sub> O <sub>5</sub> Heterostructures for High-Sensitivity Flexible Temperature Sensors with Extreme Stability
Despite advancements in flexible temperature sensors, achieving high sensitivity with robust stability remains a critical challenge. In this work, we present a 40 μm-thick ultrathin, flexible negative temperature coefficient (NTC) sensor based on PI/MnCo<sub>2</sub>O<sub>4</sub>/Ta<sub>2</sub>O<sub>5</sub>, fabricated via a water-soluble GeO<sub>2</sub> sacrificial layer transfer technique. The sensor exhibits exceptional performance, including a high temperature coefficient of resistance (TCR) of -4.1%/°C, outstanding mechanical durability (Δ<i>R</i> < 4% after 10,000 bending cycles), and remarkable thermal stability (Δ<i>R</i> < 1.5% under thermal shock). The B<sub>25/50</sub> value remains stable at 3650-3750 K, confirming excellent compositional reliability. Demonstrations in robotic e-skin and real-time respiratory monitoring highlight its potential for next-generation wearable technologies. This work provides a scalable strategy for high-performance flexible sensors in extreme environments.
Authors
- Xinmiao Wang
- Wenwen Kong (ORCID: https://orcid.org/0000-0002-0192-4868)
- Xueqing Yan (ORCID: https://orcid.org/0000-0002-2437-6577)
- Jian Wang (ORCID: https://orcid.org/0000-0002-4271-3485)
- Bo Yang (ORCID: https://orcid.org/0000-0002-9221-2144)
- Yingying Dou
- Yuxian Song
Institutions
- Xinjiang Technical Institute of Physics & Chemistry (CN)
- Technical Institute of Physics and Chemistry (CN)
- Advanced Materials and Devices (United States) (US)
- Xinjiang University (CN)
Publication Details
- Journal
- ACS Applied Materials & Interfaces
- Published
- 2025-12-01
- DOI
- https://doi.org/10.1021/acsami.5c19044
- Citations
- 1
- Primary Topic
- Advanced Sensor and Energy Harvesting Materials
- Type
- article
- Field-Weighted Citation Impact
- 0.67