Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator

Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color centers-presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology operating in the visible to near-infrared wavelength range. We introduce a scalable modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200 mm diameter silicon wafers with CMOS-compatible processes. We present a proof-of-concept device with 4 × 4 individually addressable 50 μm × 50 μm pixels or channels, each containing a resonant waveguide grating with a ~ 780 nm design wavelength, supporting > 100 MHz modulation speeds, and a spectral response with > 20 dB extinction.

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Publication Details

Journal
Nature Communications
Published
2025-11-26
DOI
https://doi.org/10.1038/s41467-025-66718-4
Primary Topic
Photonic and Optical Devices
Type
article
Field-Weighted Citation Impact
0.00

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article

Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator

Andrew Leenheer, Christopher Panuski, Matthew Zimmermann, Mark Dong et al.
Nature Communications
Photonic and Optical Devices
article

Piezoelectrically actuated silicon-nitride-based high-speed spatial light modulator

Andrew Leenheer, Christopher Panuski, Matthew Zimmermann, Mark Dong, Artur Hermans, Ian Christen, Tom Vanackere, Dirk Englund, Matt Eichenfield, Gerald Gilbert, Hamza Raniwala
article en

Abstract

Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color centers-presents among the most stringent requirements. This motivates a new generation of high-speed large-scale modulator technology operating in the visible to near-infrared wavelength range. We introduce a scalable modulator technology based on piezoelectrically actuated silicon nitride resonant waveguide gratings fabricated on 200 mm diameter silicon wafers with CMOS-compatible processes. We present a proof-of-concept device with 4 × 4 individually addressable 50 μm × 50 μm pixels or channels, each containing a resonant waveguide grating with a ~ 780 nm design wavelength, supporting > 100 MHz modulation speeds, and a spectral response with > 20 dB extinction.

Nature CommunicationsVol. 16(1)
University of Arizona (US), University of Colorado Boulder (US), Ghent University (BE), Sandia National Laboratories (US), Mitre (United States) (US), Massachusetts Institute of Technology (US)
National Science Foundation, U.S. Department of Energy, Center for Integrated Nanotechnologies, Fonds Wetenschappelijk Onderzoek, Vlaamse regering, Office of Science, National Nuclear Security Administration, Advanced Research Projects Agency, Moonshot Research and Development Program, Army Research Office, Sandia National Laboratories
Openalex Percentile: Top 63%
Photonic and Optical Devices
DOIOpen Access PDFOpenAlex
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