A Review on Piezoelectric Ultrasonic and Peristaltic Methods for Precision Motion and Measurement

Compared with electromagnetic motors, piezoelectric motors have the advantages of high torque, self-locking, and resistance to electromagnetic interference. According to the difference in working principle, piezoelectric motors are divided into ultrasonic motors and peristaltic motors. Currently, a kind of diamond-shaped oscillator ultrasonic motor for use in micro probes and a kind of anti-clamp peristaltic motor for use in spacecraft mass adjustment are being systematically developed by our research team. In order to summarize the experience and lessons learned, we conducted research on the principles, structures, and applications of existing piezoelectric drive motors, analyzed the advantages and problems of existing technologies, and developed a plan and expected indicators for completing this project. Finally, a report on the performance characteristics of different types of piezoelectric drive motors in terms of stroke range, speed, accuracy, and load capacity was summarized for reference.