Ion-beam-sputtered mid-infrared coatings for hybrid supermirrors

We report on the development of low-loss ion-beam-sputtered (IBS) mid-infrared coatings for hybrid supermirrors. Two highly reflective designs were realized: HR1, a four-period a-<i>S</i><i>i</i>/<i>S</i><i>i</i><i>O</i><sub>2</sub> DBR with an <i>A</i><i>l</i><sub>2</sub><i>O</i><sub>3</sub> bonding layer, and HR2, a six-period a-<i>S</i><i>i</i>/<i>T</i><i>a</i><sub>2</sub><i>O</i><sub>5</sub> DBR with an a-Si terminating layer for bonding. Combined with a GaAs/AlGaAs crystalline mirror, HR2-based hybrids yielded a total loss of 9.3 ppm and excess loss of 6.8 ppm at 4.45 µm, with cavity finesse up to 396,000. We used IBS-deposited a-Si directly as a bonding layer, for the first time, to our knowledge, verified its sub-angstrom roughness, and demonstrated excellent optical performance. This establishes a clear path toward scalable coatings for longer mid-infrared wavelengths, building on prior results in Nat. Commun.14, 7846 (2023).NCAOBW2041-172310.1038/s41467-023-43367-z.

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Publication Details

Journal
Applied Optics
Published
2025-11-25
DOI
https://doi.org/10.1364/ao.575163
Primary Topic
Optical Coatings and Gratings
Type
article
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article

Ion-beam-sputtered mid-infrared coatings for hybrid supermirrors

Thomas Südmeyer, Seth B. Cataño-Lopez, Garrett D. Cole, Lukas W. Perner et al.
Applied Optics
Optical Coatings and Gratings
article

Ion-beam-sputtered mid-infrared coatings for hybrid supermirrors

Thomas Südmeyer, Seth B. Cataño-Lopez, Garrett D. Cole, Lukas W. Perner, Gar-Wing Truong, Valentin Johannes Wittwer
article en

Abstract

We report on the development of low-loss ion-beam-sputtered (IBS) mid-infrared coatings for hybrid supermirrors. Two highly reflective designs were realized: HR1, a four-period a-<i>S</i><i>i</i>/<i>S</i><i>i</i><i>O</i><sub>2</sub> DBR with an <i>A</i><i>l</i><sub>2</sub><i>O</i><sub>3</sub> bonding layer, and HR2, a six-period a-<i>S</i><i>i</i>/<i>T</i><i>a</i><sub>2</sub><i>O</i><sub>5</sub> DBR with an a-Si terminating layer for bonding. Combined with a GaAs/AlGaAs crystalline mirror, HR2-based hybrids yielded a total loss of 9.3 ppm and excess loss of 6.8 ppm at 4.45 µm, with cavity finesse up to 396,000. We used IBS-deposited a-Si directly as a bonding layer, for the first time, to our knowledge, verified its sub-angstrom roughness, and demonstrated excellent optical performance. This establishes a clear path toward scalable coatings for longer mid-infrared wavelengths, building on prior results in Nat. Commun.14, 7846 (2023).NCAOBW2041-172310.1038/s41467-023-43367-z.

Applied OpticsVol. 65(5)
Thorlabs (Germany) (DE), University of Arizona (US), Freedom Photonics (United States) (US)
Openalex Percentile: Top 66%
Optical Coatings and Gratings
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