Hybrid Plasma Modeling of Capacitively-Coupled O2 Plasma at Intermediate Pressures and Comparison with Experiments
Authors
- Nakul Nuwal (ORCID: https://orcid.org/0000-0001-7568-2665)
- Jean‐Paul Booth (ORCID: https://orcid.org/0000-0002-0980-3278)
- Shahid Rauf (ORCID: https://orcid.org/0000-0001-5689-6115)
- Rupali Sahu (ORCID: https://orcid.org/0000-0003-2501-9624)
- Garrett Curley (ORCID: https://orcid.org/0000-0002-5618-1467)
- Kallol Bera (ORCID: https://orcid.org/0000-0002-9948-8098)
- Shu Zhang (ORCID: https://orcid.org/0000-0001-9366-7426)
- Abhishek Kumar Verma
Institutions
- Applied Materials (United States) (US)
- Laboratoire de Physique des Plasmas (FR)
Publication Details
- Journal
- SPIRE - Sciences Po Institutional REpository
- Published
- 2024-09-30
- Primary Topic
- Plasma Diagnostics and Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.00