Experimental study of intermediate-Pressure RF-CCP in Ar-O2 mixtures

Authors

Jean‐Paul Booth (ORCID: https://orcid.org/0000-0002-0980-3278)
Garrett Curley (ORCID: https://orcid.org/0000-0002-5618-1467)
Shu Zhang (ORCID: https://orcid.org/0000-0001-9366-7426)

Institutions

Laboratoire de Physique des Plasmas (FR)

Publication Details

Journal: SPIRE - Sciences Po Institutional REpository
Published: 2024-09-30
Primary Topic: Gas Dynamics and Kinetic Theory
Type: article
Field-Weighted Citation Impact: 0.00

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article

Experimental study of intermediate-Pressure RF-CCP in Ar-O2 mixtures

Jean‐Paul Booth, Garrett Curley, Shu Zhang

Sep 30, 2024

SPIRE - Sciences Po Institutional REpository

Gas Dynamics and Kinetic Theory

article

Experimental study of intermediate-Pressure RF-CCP in Ar-O2 mixtures

Jean‐Paul Booth, Garrett Curley, Shu Zhang

September 30, 2024article en

Abstract

No abstract available for this paper.

SPIRE - Sciences Po Institutional REpository

Laboratoire de Physique des Plasmas (FR)

Openalex Percentile: Top 49%

Gas Dynamics and Kinetic Theory

OpenAlex

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Experimental study of intermediate-Pressure RF-CCP in Ar-O2 mixtures — Jean‐Paul Booth, Garrett Curley, et al. · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS