A Six-Degree-of-Freedom (6-DOF) Simultaneous Measurement Method Using Dual-Wavelength Laser Sources for Compensation of Air-Turbulence-Induced Beam Deviation

Linear guides are fundamental components of high-end precision equipment, and their geometric errors directly affect the measurement and machining accuracy. To achieve efficient and accurate measurement of geometric motion errors in linear guides, this paper proposes a 6-DOF simultaneous measurement method that integrates heterodyne interferometry, collimation/autocollimation, and polarization principles. To address the degradation of straightness measurement accuracy under long-distance conditions caused by air turbulence, a dual-wavelength laser-based compensation method is developed to suppress turbulence-induced beam deviation. A turbulence compensation model based on a dual-wavelength proportional cancellation principle is established, and its effectiveness is verified through COMSOL (v6.3) simulations and experimental studies. Experimental results show that the proposed approach significantly outperforms the traditional simple moving-average (SMA) filter. It improves straightness measurement stability by more than 56%. Under a 3200 mm measurement range and ordinary laboratory conditions, the repeatabilities (k = 2) of the 6-DOF motion-error measurements are 6.4 μm for positioning error, 6.4 μm and 5.5 μm for straightness errors, 1.7″ and 2.1″ for yaw and pitch errors, and 4.3″ for roll error. The proposed method exhibits high measurement accuracy and robustness, making it suitable for simultaneous 6-DOF motion-error measurement of long linear guides.