The comparison of NH3 and N2O plasma treatments on PZT Lead zirconate titanate sensing membranes applied in biosensor

This study conducted a comparative analysis of NH3 and N 2 O plasma treatments on PZT (lead zirconate titanate, Pb(Zr 0.52 Ti 0.48 )O 3 ) sensing membranes integrated within the EIS (Electrolyte-Insulator-Semiconductor) structure. PZT sensing membranes subjected to NH 3 and N 2 O plasma treatments were examined using multiple material analysis techniques, including X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM). The PZT sensing membrane treated with N 2 O plasma for 1 min exhibited the highest sensitivity, superior linearity, lowest hysteresis voltage, and minimal drift rate compared to the other N 2 O plasma conditions. Likewise, the PZT sensing membrane treated with NH 3 plasma for 6 min demonstrated the highest sensitivity, optimal linearity, excellent H + selectivity, lowest hysteresis voltage, and least drift rate among the various plasma conditions. Additionally, we investigated the biomedical sensing characteristics of PZT sensing membranes in urea, creatinine, and glucose solutions. Measurements revealed that PZT sensing membranes exhibited optimal sensing characteristics for urea, creatinine, and glucose when subjected to a 6-min exposure to ammonia plasma. Notably, the sensing membrane demonstrated the best sensitivity and linearity for glucose, with values of 15.5 mV/mM and 98.49 %, respectively. These results highlight that the PZT sensing membrane, following plasma treatment within the EIS structure, is well-suited for applications in biomedical devices. • A comparative study of NH₃ and N₂O plasma treatments on PZT sensing membranes is presented. • Optimized plasma conditions significantly enhance PZT sensitivity, linearity, and drift rate. • The EIS structure with PZT shows superior ion, urea, creatinine, and glucose detection. • NH₃ plasma for 6 min and N₂O plasma for 1 min yield the best biosensor performance. • Plasma-treated PZT films provide new insights for advanced ferroelectric biosensors.