Silicon nitride photonic platform on glass for scalable, high-density optical redistribution layers in panel-level packaging
We present silicon nitride photonics on glass (SING), demonstrated at the wafer-level, establishing its feasibility for high-density optical redistribution layers (RDLs) in panel-level packaging. Demonstrated passive components support 106 Gbps transmission, enabling scalable wafer-level optical interconnects with grating couplers, ring resonators, MMI couplers, MZIs, and stitched waveguides. With a compact 100 µm bend radius, SING enables a 10× higher density than LDW or IOX glass platforms, while remaining compatible with large-panel processing. This positions SING as a promising and scalable solution for next-generation optical RDLs.
Authors
- Jonggeon Lee
- Kwang-Won Jo (ORCID: https://orcid.org/0000-0003-1240-4208)
- B.G. Lee
- Wai-Shing Choi (ORCID: https://orcid.org/0009-0000-8641-827X)
- Joongku Lee (ORCID: https://orcid.org/0000-0001-6250-3138)
- Taewon Jin (ORCID: https://orcid.org/0000-0003-4613-0516)
- Younghyun Kim (ORCID: https://orcid.org/0000-0001-8072-1251)
- Myunghwan Kim (ORCID: https://orcid.org/0000-0002-4263-8585)
- Sanghoon Shin (ORCID: https://orcid.org/0000-0002-2412-7159)
- S.G. Yoon (ORCID: https://orcid.org/0000-0002-9482-390X)
- Soo-Yong Jung (ORCID: https://orcid.org/0009-0002-7552-2754)
- Seungwoo Park (ORCID: https://orcid.org/0009-0003-6701-5370)
- H. S. Jung (ORCID: https://orcid.org/0009-0004-5430-7910)
- Minchul Jang
Institutions
- Electronics and Telecommunications Research Institute (KR)
- Korea Advanced Nano Fab Center (KR)
Publication Details
- Journal
- Optics Express
- Published
- 2025-11-10
- DOI
- https://doi.org/10.1364/oe.576420
- Citations
- 1
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.73