Prediction of Cross-Sectional Images and Proposing Processes with Neural Network
We developed a novel system that quickly predicts cross-sectional images from experimental conditions to minimize cross-sectional processing. This has become a bottleneck in observing pattern shapes of materials used in substrate manufacturing. This system can predict cross-sectional images from experimental conditions and propose process conditions to form the desired pattern shape. We consider that using this system will improve the development speed of overall semiconductor packages.
Authors
- Hiromu Sugiyama (ORCID: https://orcid.org/0000-0002-5001-5169)
- Kohei Motojima
- Kaede Ameyama
- Chiho Ueta
Institutions
- Taiyo Yuden (Japan) (JP)
- Technology Holding (United States) (US)
Publication Details
- Journal
- IMAPSource Proceedings
- Published
- 2025-11-10
- DOI
- https://doi.org/10.4071/001c.147292
- Primary Topic
- Industrial Vision Systems and Defect Detection
- Type
- article
- Field-Weighted Citation Impact
- 0.00