Cavity-backed Antennas using Quartz Glass on Silicon Hybrid Bonded Wafers for Sub-THz Communication and Radar Applications

In this work, we present a novel cavity-backed wideband and high gain antenna using Quartz glass and silicon bonded wafers for sub-THz wireless communication and radar sensing applications. We rigorously studied the impact of the dimensions of the cavity on the gain, bandwidth and radiation pattern of the antenna. Test samples of the antenna were fabricated and measured. Excellent correlation was obtained between measurement and simulation results. For optimal cavity dimensions, maximum gain per patch element of approximately 7 dBi and bandwidth of 14 GHz were obtained.