A novel high-sensitivity MOEMS gyroscope based on a double layer two-dimensional photonic crystal array

Most micro-electromechanical systems (MEMS) gyroscopes use capacitive detection to sense displacement from angular velocity, but parasitic capacitance and electromagnetic interference limit precision. Micro-opto-electro-mechanical systems (MOEMS) gyroscopes replace capacitive readout with optical detection, improving sensitivity and interference resistance, yet integrating optical structures with diverse motion modes remains challenging. We propose a high-sensitivity MOEMS y-axis gyroscope based on a double-layer two-dimensional photonic crystal array (2L2DPCA). One photonic layer is fixed to the substrate and the second is attached to a movable sensing mass, which enhances light confinement and reduces optical energy loss. A dual-decoupled beam design isolates nonplanar motion and suppresses cross-coupling in the x and y axes. Simulations show excellent in-plane uniformity and coupling-error suppression. Mechanical sensitivity reaches 57.82 nm/(°/s); overall output sensitivity after optoelectronic conversion is ≈31.24 mV/(°/s). Angular random walk (ARW) is 3.77×10⁻⁵ °/h1/2 for coupling gaps d≈0.1–0.2μm. Experimental results validate rotational response and indicate real-time performance potential in engineering and aerospace environments. The proposed device combines high sensitivity, reduced noise, and robust anti-interference characteristics, improving measurement accuracy and dynamic range for compact navigation and precision sensing applications.