The Suppression of Spurious Modes in TC-SAW Resonators by the Application of Bent Metal Strips
This article investigates the use of bent metal strips on the top of a SiO<sub>2</sub> layer for the suppression of spurious modes in temperature-compensated surface acoustic wave (TC-SAW) resonators employing a SiO<sub>2</sub>/Cu/128°YX-LiNbO<sub>3</sub> structure. The proposed metal strip method includes two parts: a primary metal strip located at the edge of the interdigital transducer (IDT) aperture region and a secondary metal strip in the gap region. The impact of the geometric parameters of bent metal strips was calculated by the 3D finite element method (FEM), and theoretical simulation results show that this method can effectively suppress the transverse modes and mitigate the gap modes originating from the gap region in conventional TC-SAW resonators. Furthermore, experimental validation further confirms that the proposed method can effectively suppress nearly all spurious modes without degrading the performance of the quality factor.
Authors
- Yuanhang Chen (ORCID: https://orcid.org/0000-0002-5223-3434)
- Xiaojing Mu (ORCID: https://orcid.org/0000-0003-2024-2595)
- Menghui Li (ORCID: https://orcid.org/0000-0002-7630-1286)
- Mengke Qi
- Hong Zhou (ORCID: https://orcid.org/0000-0002-3146-2238)
- Liang Cao (ORCID: https://orcid.org/0000-0002-2117-2245)
- Yimin Cheng
Institutions
- Chongqing University (CN)
- Northwestern Polytechnical University (CN)
Publication Details
- Journal
- Sensors
- Published
- 2025-11-13
- DOI
- https://doi.org/10.3390/s25226926
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Natural Science Foundation of China
- Centre Scientifique et Technique du Bâtiment
- Science Fund for Distinguished Young Scholars of Chongqing