Mixed Co-Mn oxide coatings synthetized by DLI-MOCVD for SOC interconnect a parametric study for composition and homogeneity control
The present study investigates the synthesis of mixed cobalt manganese oxide coating for Solid Oxide Cell (SOC) interconnect application using DLI-MOCVD (Direct Liquid Injection-Metal Oxide Chemical Vapor Deposition). The possibility to control the coating thickness and composition by injecting a mixed solution of Co(acac)<sub>3</sub> and Mn(acac)<sub>3</sub> precursors is demonstrated. Various oxide compositions from Mn<sub>x</sub>Co<sub>1-x</sub>O to Mn<sub>x</sub>Co<sub>3-x</sub>O<sub>4</sub> are synthesized. An acceptable homogeneity in terms of thickness and composition is possible over 25 cm along a tubular reactor which makes this process suitable for industrial application.
Authors
- Romain Chanson (ORCID: https://orcid.org/0000-0002-2702-469X)
- F. Miserque (ORCID: https://orcid.org/0009-0001-5780-9658)
- Fabien Rouillard (ORCID: https://orcid.org/0000-0002-3660-4215)
- Frédéric Schuster
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- Université Paris-Saclay (FR)
- CEA Paris-Saclay (FR)
- Institut de Recherche sur les Lois Fondamentales de l'Univers (FR)
Publication Details
- Journal
- Scientific Reports
- Published
- 2025-11-14
- DOI
- https://doi.org/10.1038/s41598-025-23783-5
- Primary Topic
- Electrical and Thermal Properties of Materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00