Astigmatic Displacement Microscopy (ADM) with Subnanometer Axial Resolution for Three-Dimensional (3D) Morphological Characterization
In response to the growing demand for advanced micro/nano characterization in materials and surface-interface sciences, we report a highly sensitive astigmatism displacement microscopy (ADM) system with subnanometer axial resolution of 0.1 nm. This low-power, noncontact, nondestructive, and rapid optical 3D imaging technique enables large-area characterization with exceptional imaging quality. Using ADM, we achieved high-quality 3D morphology characterization of Au nanoplates, CD-ROMs, semiconductor Si wafers, and few-layer 2D materials (like MoS<sub>2</sub>). For few-layer 2D materials, ADM demonstrates a linear capability to resolve atomic layer numbers. Additionally, ADM successfully characterized transparent and semitransparent single crystals, even in the presence of inclination-induced interference fringes. The development of ADM provides a powerful tool for micro/nanoscale characterization, with significant implications for materials and surface-interface research.
Authors
- Ruilin Yang (ORCID: https://orcid.org/0000-0003-4476-0717)
- Qiaosheng Pu (ORCID: https://orcid.org/0000-0002-5241-7196)
- Dan Zhou
- Xitong Dang (ORCID: https://orcid.org/0000-0003-3076-6237)
- Chun‐Lin Sun (ORCID: https://orcid.org/0000-0001-8936-6129)
- Jiang-Hua Zhang (ORCID: https://orcid.org/0000-0001-6850-0501)
- Fei-Cen Ma (ORCID: https://orcid.org/0009-0007-0136-1624)
- H.Y. Li (ORCID: https://orcid.org/0009-0009-5212-9352)
- Dou-Dou Ren (ORCID: https://orcid.org/0009-0000-9150-7816)
- B. Zhang (ORCID: https://orcid.org/0009-0003-0703-3809)
- Zhi‐Cong Zeng (ORCID: https://orcid.org/0000-0002-5997-5043)
- Haijun Zhang (ORCID: https://orcid.org/0000-0002-6219-9081)
- Xiaolei He (ORCID: https://orcid.org/0000-0003-1739-5355)
- Weibing Wang (ORCID: https://orcid.org/0000-0002-4497-5251)
- Yuewen Zhang (ORCID: https://orcid.org/0000-0003-1864-769X)
- Huiqin Zhou (ORCID: https://orcid.org/0000-0002-3041-4365)
- Yan Shang (ORCID: https://orcid.org/0000-0001-8857-7733)
Institutions
- Zhaoqing University (CN)
- S Group Holding (Czechia) (CZ)
- China Nonferrous Metal Mining (China) (CN)
- Tongling Nonferrous Metals Group Holding (China) (CN)
- State Key Laboratory of Chemical Engineering (CN)
- Institute of New Materials (CN)
- Lanzhou University (CN)
Publication Details
- Journal
- Analytical Chemistry
- Published
- 2025-11-14
- DOI
- https://doi.org/10.1021/acs.analchem.5c04988
- Primary Topic
- Force Microscopy Techniques and Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.00