Influence of Crystal Orientation on the Etch Rate and Crack Formation of Laser-modified Sapphire Using Ultrashort Pulsed NIR Laser Radiation
Publication Details
- Journal
- Journal of Laser Micro/Nanoengineering
- Published
- 2025-11-01
- DOI
- https://doi.org/10.2961/jlmn.2025.03.2012
- Primary Topic
- Laser Material Processing Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00