Development of an original compact multigas detection system based on MEMS components
Abstract An original compact multigas detection system based on micro electro mechanical systems components is presented. A micro preconcentrator, a micro separation column and a micro-thermal conductivity detector are coupled to each other using a novel micro-machined fluidic circuit board, simplifying the fabrication and assembly of these components with significant savings in manufacturing time, footprint and robustness of the overall system. The performances of the system are illustrated with the analysis of several typical volatile organic compounds mixtures.
Authors
- M. Jurdit (ORCID: https://orcid.org/0009-0007-0458-679X)
- Jean‐Baptiste Tissot
- Alexandre Teulle (ORCID: https://orcid.org/0000-0001-6510-8731)
- Stéphane Caplet
- Florence Ricoul (ORCID: https://orcid.org/0000-0003-3359-9497)
- E. Lefrançois (ORCID: https://orcid.org/0000-0002-8959-7848)
- J.-F. Bêche
- Mahfod Benessalah
Institutions
- Commissariat à l'Énergie Atomique et aux Énergies Alternatives (FR)
- CEA Grenoble (FR)
- Direction de la Recherche Technologique (FR)
- Université Grenoble Alpes (FR)
Publication Details
- Journal
- Journal of Micromechanics and Microengineering
- Published
- 2025-11-12
- DOI
- https://doi.org/10.1088/1361-6439/ae1e88
- Primary Topic
- Advanced Chemical Sensor Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00