Three‐Dimensional X‐Ray Diffraction Analysis Using Energy‐Dispersive X‐Ray Detector and Straight Capillary Optics

ABSTRACT We developed an X‐ray diffraction technique to measure the three‐dimensional crystal distribution of samples. By using an energy‐dispersive detector and installing two straight X‐ray optics in quasi‐confocal arrangement, an X‐ray diffraction spectrum from a targeted microscopic region of the sample can be obtained while keeping the irradiation and detection angles of the X‐rays on the sample constant. Therefore, the three‐dimensional crystal distribution of a sample can be measured by scanning the quasi‐confocal (intersection) of two straight X‐ray optics. By enabling the sample stand and detector to be driven by a newly added coaxial stepping motor this time, the X‐ray irradiation angle and detected angle can be electrically controlled. Therefore, the appropriate measurement angle can be quickly controlled. Using an energy‐dispersive detector to measure X‐ray diffraction presents an advantage: unlike general X‐ray diffraction measurements, angle scanning is not required at each measurement point, and consequently, the measurement target range does not change. In this study, we demonstrated the developed technique using samples of muscovite film, Si powder, and Ni thin film, and evaluated the spatial resolution of our new technique.