High-performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves

This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves. Through theoretical and simulation analysis, the influence of key parameters such as the spacing between anode and cathode, depth of microgrooves and the distribution of vias on the performance of the hydrophone was determined. By using the new microgroove structures, micron-scale anode and cathode spacing was realized and effective cathode areas were greatly enlarged and eventually increased the sensitivities of the hydrophones. Furthermore, a force-balanced negative feedback system was designed to expand the effective working band of the vector hydrophone. The characterization results indicated that the device had ~2 times higher original sensitivities and wider -3dB-bandwidth than that of existing devices. The above results show that the vector hydrophone developed in this work has a wide application scenarios in the field of underwater sound detections.

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Publication Details

Journal
Microsystems & Nanoengineering
Published
2025-11-12
DOI
https://doi.org/10.1038/s41378-025-01040-z
Citations
1
Primary Topic
Geophysics and Sensor Technology
Type
article
Field-Weighted Citation Impact
1.15

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High-performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves

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High-performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves

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article en
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Abstract

This paper reports a high performance co-oscillating electrochemical vector hydrophone based on integrated microelectrodes with microgrooves. Through theoretical and simulation analysis, the influence of key parameters such as the spacing between anode and cathode, depth of microgrooves and the distribution of vias on the performance of the hydrophone was determined. By using the new microgroove structures, micron-scale anode and cathode spacing was realized and effective cathode areas were greatly enlarged and eventually increased the sensitivities of the hydrophones. Furthermore, a force-balanced negative feedback system was designed to expand the effective working band of the vector hydrophone. The characterization results indicated that the device had ~2 times higher original sensitivities and wider -3dB-bandwidth than that of existing devices. The above results show that the vector hydrophone developed in this work has a wide application scenarios in the field of underwater sound detections.

Microsystems & NanoengineeringVol. 11(1)
Chinese Academy of Sciences (CN), State Key Laboratory of Transducer Technology (CN), Aerospace Information Research Institute (CN), University of Chinese Academy of Sciences (CN)
National Natural Science Foundation of China, Chinese Academy of Sciences, Youth Innovation Promotion Association of the Chinese Academy of Sciences, Youth Innovation Promotion Association
Openalex Percentile: Top 17%
Geophysics and Sensor Technology
1.15
DOIOpen Access PDFOpenAlex
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