Green (524 nm) InGaN/GaN laser diodes with nano-porous cladding and deep-ridge waveguiding
III-Nitride edge-emitting laser diodes operating at green wavelengths (<i>λ</i> = 524 nm) with nano-porous GaN cladding are demonstrated under pulsed electrical injection. Device performance is enhanced by employing a deeply etched ridge waveguide combined with atomic layer deposition (ALD) sidewall passivation. Compared to shallow-ridge reference lasers, deep-ridge lasers exhibit higher efficiency and lower loss through a combination of improved lateral carrier confinement and improved porous etch selectivity. Internal loss was reduced from 35 cm<sup>-1</sup> to 21 cm<sup>-1</sup> calculated from variable stripe length analysis, with a similar loss reduction observed in segmented contact absorption curves. Epitaxial improvements are needed to address high threshold current density (22 kA/cm<sup>2</sup>) and low injection efficiency (16%), but quasi-continuous-wave operation is demonstrated.
Authors
- Haojun Zhang (ORCID: https://orcid.org/0000-0001-8662-3222)
- Shuji Nakamura (ORCID: https://orcid.org/0000-0001-6334-2428)
- Emily Trageser
- Steven P. DenBaars (ORCID: https://orcid.org/0000-0002-6612-5258)
- Jiaao Zhang (ORCID: https://orcid.org/0000-0002-7207-8515)
- Matthew Wong (ORCID: https://orcid.org/0000-0003-2680-961X)
- Justin Tan (ORCID: https://orcid.org/0000-0002-5098-383X)
- Ryan Anderson
- Arturo Juan
Publication Details
- Journal
- Optics Express
- Published
- 2025-11-10
- DOI
- https://doi.org/10.1364/oe.579481
- Primary Topic
- GaN-based semiconductor devices and materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00