Green (524 nm) InGaN/GaN laser diodes with nano-porous cladding and deep-ridge waveguiding

III-Nitride edge-emitting laser diodes operating at green wavelengths (<i>λ</i> = 524 nm) with nano-porous GaN cladding are demonstrated under pulsed electrical injection. Device performance is enhanced by employing a deeply etched ridge waveguide combined with atomic layer deposition (ALD) sidewall passivation. Compared to shallow-ridge reference lasers, deep-ridge lasers exhibit higher efficiency and lower loss through a combination of improved lateral carrier confinement and improved porous etch selectivity. Internal loss was reduced from 35 cm<sup>-1</sup> to 21 cm<sup>-1</sup> calculated from variable stripe length analysis, with a similar loss reduction observed in segmented contact absorption curves. Epitaxial improvements are needed to address high threshold current density (22 kA/cm<sup>2</sup>) and low injection efficiency (16%), but quasi-continuous-wave operation is demonstrated.

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Publication Details

Journal
Optics Express
Published
2025-11-10
DOI
https://doi.org/10.1364/oe.579481
Primary Topic
GaN-based semiconductor devices and materials
Type
article
Field-Weighted Citation Impact
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article

Green (524 nm) InGaN/GaN laser diodes with nano-porous cladding and deep-ridge waveguiding

Haojun Zhang, Shuji Nakamura, Emily Trageser, Steven P. DenBaars et al.
Optics Express
GaN-based semiconductor devices and materials
article

Green (524 nm) InGaN/GaN laser diodes with nano-porous cladding and deep-ridge waveguiding

Haojun Zhang, Shuji Nakamura, Emily Trageser, Steven P. DenBaars, Jiaao Zhang, Matthew Wong, Justin Tan, Ryan Anderson, Arturo Juan
article en

Abstract

III-Nitride edge-emitting laser diodes operating at green wavelengths (<i>λ</i> = 524 nm) with nano-porous GaN cladding are demonstrated under pulsed electrical injection. Device performance is enhanced by employing a deeply etched ridge waveguide combined with atomic layer deposition (ALD) sidewall passivation. Compared to shallow-ridge reference lasers, deep-ridge lasers exhibit higher efficiency and lower loss through a combination of improved lateral carrier confinement and improved porous etch selectivity. Internal loss was reduced from 35 cm<sup>-1</sup> to 21 cm<sup>-1</sup> calculated from variable stripe length analysis, with a similar loss reduction observed in segmented contact absorption curves. Epitaxial improvements are needed to address high threshold current density (22 kA/cm<sup>2</sup>) and low injection efficiency (16%), but quasi-continuous-wave operation is demonstrated.

Optics ExpressVol. 33(25)
Openalex Percentile: Top 79%
GaN-based semiconductor devices and materials
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