Silicon Nanowires Coated with ZnO Tetrapods for Breath Monitoring Application

In this study, we investigate the potential of silicon nanowire (SiNW) structures spin-coated with ZnO tetrapods for application in respiratory sensors. The fabricated SiNWs were characterized using scanning electron microscopy and energy-dispersive X-ray spectroscopy, revealing vertically aligned, randomly distributed SiNW arrays with ZnO tetrapod clusters dispersed across their surfaces. Electrical measurements of the sensing characteristics demonstrated that the incorporation of ZnO onto the SiNWs significantly enhanced sensor stability, improved response time, and reduced baseline resistance over time. The results highlight the potential of this SiNW-ZnO hybrid structure as a promising candidate for low-cost, low-power, and compact respiratory sensors, offering significant advantages for healthcare applications.