Modeling of a Quasi-Static 2D-MEMS Vector Scanner with a Hybrid-Integrated Moving Magnet Drive

Optical beam steering applications need compact and robust designs with high dynamic performances. This paper presents a parametric analytical dynamic model of a new quasi-static 2D-MEMS vector scanner with a hybrid-integrated moving magnet drive. The mechanical subsystem is modeled as a multibody system using the Euler-Lagrange formalism. The electromagnetic gimbal drive model is derived from the magnetostatic Maxwell’s equations. All models incorporate in parametric manner relevant physical properties and manufacturing tolerances like geometry and mass properties of mechanical elements (2-axis gimbal system, flexible suspension, magnet) as well as tolerances of magnetic field alignments of the drive coils. The resulting nonlinear model includes all relevant coupling effects and allows for a comprehensive parametric analysis of the dynamic properties of the vector scanner. The sensitivity to important design parameters is shown in the frequency domain at various operating points. The quality and applicability of the dynamic model is verified by comparison with FEA results and experimental frequency responses measured with a prototype vector scanner available at FhG IPMS. Based on the successful experimental verification, the presented parametric analytical dynamic model can be used for further MEMS system optimization (manufacturing tolerances vs. dynamic performance) and can be applied for model-based controller design for high precision trajectory tracking control.