Scalable Manufacturing of Thin-Film Shape Memory Alloys for Electronics, Aerospace Systems, and Robotics

Abstract This article examines industrial-scale physical vapor deposition (PVD) manufacturing of shape memory alloy thin films for miniaturized applications. Thin-film shape memory alloys (SMAs) provide multifunctionality by simultaneously serving as substrate, actuator, interconnect, and electrode within single microscale elements. Industrial-scale PVD manufacturing enables reproducible fabrication, positioning thin-film SMAs as a platform technology for next-generation adaptive systems in electronics, aerospace, and robotics.