Pool Boiling Heat Transfer on Directly 3D-Printed Metallic Micropillars on Silicon Chips

This study investigates pool boiling heat transfer on metallic micropillar arrays fabricated directly onto silicon wafers using laser powder bed fusion (LPBF). A two-step deposition strategy was employed, in which a thin Sn-3Ag interlayer was printed to enhance metallurgical bonding and thermal compatibility, followed by the fabrication of AISi10Mg micropillars. The working fluid was TMC-49, tested at atmospheric pressure on both a bare silicon wafer and the LPBF-fabricated micropillar surface. High-speed imaging revealed that the bare silicon exhibited sparse nucleation at low heat fluxes, rapid bubble coalescence, and early vapor blanketing near CHF <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\sim 85\text{kW}/\mathrm{m}^{2})$</tex>, whereas the micropillar surface maintained uniform nucleation, rapid bubble departure, and continuous liquid rewetting up to CHF (−379 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{kW}/\mathrm{m}^{2})$</tex>. This represents a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$4.5\times$</tex> enhancement in CHF. The micropillar surface also exhibited <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathrm{a} &gt; 7\times$</tex> improvement in peak heat transfer coefficient (HTC), reaching <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 11.9 \text{kW}/\mathrm{m}^{2}\mathrm{K}$</tex> compared to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 1.6\text{kW}/\mathrm{m}^{2}\kappa$</tex> for the plain wafer. These gains are attributed to increased nucleation site density, capillary-driven liquid replenishment through inter-pillar channels, increased stability in vapor venting, and additional surface roughness from LPBF-sintered particles that augment surface area and promote microlayer evaporation. The results demonstrate that LPBF offers a scalable alternative to traditional microfabrication methods, enabling high-performance boiling surfaces without complex cleanroom processing.

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Published
2025-09-24
DOI
https://doi.org/10.1109/therminic65879.2025.11216872
Primary Topic
Heat Transfer and Boiling Studies
Type
article
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article

Pool Boiling Heat Transfer on Directly 3D-Printed Metallic Micropillars on Silicon Chips

Riccardo Casati, Paolo Di Marco, Alekos Ioannis Garivalis, Shirin Dehgahi et al.
Heat Transfer and Boiling Studies
article

Pool Boiling Heat Transfer on Directly 3D-Printed Metallic Micropillars on Silicon Chips

Riccardo Casati, Paolo Di Marco, Alekos Ioannis Garivalis, Shirin Dehgahi, Amin Hodaei, Davoud Jafari, Andrea Mistrini, Irene Marchi
article en

Abstract

This study investigates pool boiling heat transfer on metallic micropillar arrays fabricated directly onto silicon wafers using laser powder bed fusion (LPBF). A two-step deposition strategy was employed, in which a thin Sn-3Ag interlayer was printed to enhance metallurgical bonding and thermal compatibility, followed by the fabrication of AISi10Mg micropillars. The working fluid was TMC-49, tested at atmospheric pressure on both a bare silicon wafer and the LPBF-fabricated micropillar surface. High-speed imaging revealed that the bare silicon exhibited sparse nucleation at low heat fluxes, rapid bubble coalescence, and early vapor blanketing near CHF <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$(\sim 85\text{kW}/\mathrm{m}^{2})$</tex>, whereas the micropillar surface maintained uniform nucleation, rapid bubble departure, and continuous liquid rewetting up to CHF (−379 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{kW}/\mathrm{m}^{2})$</tex>. This represents a <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$4.5\times$</tex> enhancement in CHF. The micropillar surface also exhibited <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\mathrm{a} &gt; 7\times$</tex> improvement in peak heat transfer coefficient (HTC), reaching <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 11.9 \text{kW}/\mathrm{m}^{2}\mathrm{K}$</tex> compared to <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 1.6\text{kW}/\mathrm{m}^{2}\kappa$</tex> for the plain wafer. These gains are attributed to increased nucleation site density, capillary-driven liquid replenishment through inter-pillar channels, increased stability in vapor venting, and additional surface roughness from LPBF-sintered particles that augment surface area and promote microlayer evaporation. The results demonstrate that LPBF offers a scalable alternative to traditional microfabrication methods, enabling high-performance boiling surfaces without complex cleanroom processing.

University of Pisa (IT), Politecnico di Milano (IT), University of Twente (NL)
Openalex Percentile: Top 66%
Heat Transfer and Boiling Studies
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