Research on Surface Dispersed Discharge Plasma Based on Electric Field Control

ABSTRACT In this paper, firstly, the effect of different electrodes located on the lower surface of the dielectric on the spatial electric field distribution and discharge is investigated. The results show that the electrode structure with staggered parallel linear electrodes (ESSPLE) forms a nonuniform electric field with low difference in electric field intensity on the dielectric surface, which is conducive to the formation of large area diffusion discharge. Secondly, the effect of etching grooves on the dielectric surface on the spatial electric field distribution and discharge is analyzed. It can be found that the electric field intensity of the air gap near the groove increases, which is conducive to promoting the diffusion of discharge to the weak electric field area.