Supersaturation-Dependent Competition between β and κ Phases in the MOVPE Growth of Ga <sub>2</sub> O <sub>3</sub> on Al <sub>2</sub> O <sub>3</sub> (0001) and GaN (0001) Substrates
We present an analysis of the phase stabilization of β-Ga<sub>2</sub>O<sub>3</sub> and κ-Ga<sub>2</sub>O<sub>3</sub> grown by metal-organic vapor-phase epitaxy with varying supersaturation of the gas-phase precursors on c-sapphire and GaN substrates. We compare in-depth structural analyses of the bulk and interface layers, also through the measurement of strain relaxation across the structure, with a comprehensive nucleation model, based on multiscale simulations. A coherent and quantitative interpretation of different stages of the nucleation of Ga<sub>2</sub>O<sub>3</sub> phases on sapphire is elaborated on, highlighting the crucial role of the supersaturation of gas precursors and of the residual misfit strain within the initial layers in the stabilization of competing Ga<sub>2</sub>O<sub>3</sub> polymorphs.
Authors
- Aldo Ugolotti (ORCID: https://orcid.org/0000-0002-4894-070X)
- Leo Miglio (ORCID: https://orcid.org/0000-0002-1329-527X)
- Piero Mazzolini (ORCID: https://orcid.org/0000-0003-2092-5265)
- R. Fornari (ORCID: https://orcid.org/0000-0002-4499-8015)
- Francesco Mezzadri (ORCID: https://orcid.org/0000-0001-9505-1457)
- Roberto Bergamaschini (ORCID: https://orcid.org/0000-0002-3686-2273)
- Zs. Fogarassy
- A. Ardenghi (ORCID: https://orcid.org/0000-0002-4987-1873)
- Oliver Bierwagen (ORCID: https://orcid.org/0000-0002-4746-5660)
- Ildikó Cora (ORCID: https://orcid.org/0000-0002-3002-7277)
- B. Pécz (ORCID: https://orcid.org/0000-0002-4651-6972)
- Stefano Leone (ORCID: https://orcid.org/0000-0003-4579-3529)
- L. Seravalli (ORCID: https://orcid.org/0000-0003-2784-1785)
- Matteo Bosi (ORCID: https://orcid.org/0000-0001-8992-0249)
- Ludovico Cademartiri (ORCID: https://orcid.org/0000-0001-8805-9434)
- Ilaria Bertoni (ORCID: https://orcid.org/0009-0007-8068-9520)
- L. Nasi (ORCID: https://orcid.org/0000-0002-1663-1558)
Institutions
- University of Parma (IT)
- Fraunhofer Institute for Applied Solid State Physics (DE)
- Sustainability Institute (ZA)
- Institute of Materials for Electronics and Magnetism (IT)
- Forschungsverbund Berlin (DE)
- HUN-REN Centre for Energy Research (HU)
- University of Milano-Bicocca (IT)
Publication Details
- Journal
- ACS Applied Materials & Interfaces
- Published
- 2025-10-31
- DOI
- https://doi.org/10.1021/acsami.5c13401
- Citations
- 1
- Primary Topic
- Ga2O3 and related materials
- Type
- article
- Field-Weighted Citation Impact
- 0.43