基于改进U-Net的光刻热点检测方法

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Publication Details

Journal
Laser & Optoelectronics Progress
Published
2025-01-01
DOI
https://doi.org/10.3788/lop250604
Primary Topic
Image and Object Detection Techniques
Type
article
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article

基于改进U-Net的光刻热点检测方法

孙侠 Sun Xia, 袁野 Yuan Ye, 徐辉 Xu Hui, 梁华国 Liang Huaguo et al.
Laser & Optoelectronics Progress
Image and Object Detection Techniques
article

基于改进U-Net的光刻热点检测方法

孙侠 Sun Xia, 袁野 Yuan Ye, 徐辉 Xu Hui, 梁华国 Liang Huaguo, 黄正峰 Huang Zhengfeng, 肖鑫忠 Xiao Xinzhong, 黄文馨 Huang Wenxin
article en

Abstract

No abstract available for this paper.
Laser & Optoelectronics ProgressVol. 62(21)
Openalex Percentile: Top 68%
Image and Object Detection Techniques
DOIOpen Access PDFOpenAlex
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基于改进U-Net的光刻热点检测方法 — 孙侠 Sun Xia, 袁野 Yuan Ye, et al. · Laser & Optoelectronics Progress (2025) | TGRS Research Map | TGRS