M2.2.3 - High-resolution laser ablation of a copper layer for the fabrication of 3D-printed MEMS and microsensors
This paper presents a novel method for structuring metallized layers on a polymer layer using laser ablation.The technique enables the fabrication of metallic tracks with a resolution of about 1 m with minimal or no damage to the underlying polymer layer.It offers the flexibility required for complex 3Dprinted structures and overcomes the limitations of conventional approaches.It will provide an efficient alternative for MEMS fabrication.
Authors
- Pierre Calmon (ORCID: https://orcid.org/0000-0002-5652-3500)
- Costas Arvanitis (ORCID: https://orcid.org/0000-0002-7737-1446)
- Vincent Mansard (ORCID: https://orcid.org/0000-0002-4093-6415)
- María Roig (ORCID: https://orcid.org/0000-0002-5066-1670)
- David Bourrier (ORCID: https://orcid.org/0000-0003-0659-1924)
- Christian Bergaud (ORCID: https://orcid.org/0000-0003-0093-9600)
Institutions
- Laboratoire d'Analyse et d'Architecture des Systèmes (FR)
- Laboratoire des Technologies de la Microélectronique (FR)
Publication Details
- Journal
- Lectures
- Published
- 2025-01-01
- DOI
- https://doi.org/10.5162/eurosensors2025/m2.2.3
- Primary Topic
- Laser-Ablation Synthesis of Nanoparticles
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Equipex
- Agence Nationale de la Recherche
- Centre National de la Recherche Scientifique