Compact Six-Degree-of-Freedom Displacement Sensing Based on Laser Reflection and Position-Sensitive Detectors

To meet pose-control and vibration-suppression requirements in confined spaces, a compact, noncontact six-degree-of-freedom (6-DoF) displacement-sensing method is proposed. The method is based on laser reflection and a position-sensitive detector (PSD) and features an adjustable incidence angle. An adjustable-incidence-angle PSD–corner-cube retro-reflector (CCR) configuration is devised, which reduces the PSD’s spatial footprint to 10.4% of that of a conventional layout. Building on this configuration, an analytical model is derived that maps the target’s 6-DoF displacement to the PSD spot motion as a function of the fixed relative pose between the PSD and the CCR mounted on the target. The model is linearized under the small-angle assumption. Experiments show an accuracy of 5.89 μm for translation within ±1.5 mm and 0.0027° for rotation within ±0.5°. The method couples a compact architecture with high precision and provides both a theoretical basis and an engineering-ready pathway for high-bandwidth pose sensing in confined spaces.