Kinetic Monte Carlo Simulation of the Electron Energy Distribution Function Formation in a High-Voltage Pulsed Discharge with an Extended Hollow Cathode in Argon

We investigated the evolution of ionization fronts and the formation of the electron energy distribution function (EEDF) in a nanosecond argon discharge with an extended hollow cathode. The calculations are performed using the Monte Carlo method at different stages of the discharge process. We describe the Monte Carlo method for calculating of the EEDF in a nanosecond pulse discharge. The results of the EEDF calculations for various stages of the discharge process at a gas pressure of 10 Torr and different distances from the bottom of the cathode cavity are presented. It is demonstrated that high-energy electrons with an energy exceeding 500 eV are generated during the discharge in this work.