Hybrid deburring of micro-machined titanium alloy channels with O2 plasma large pulsed electron beam (LPEB) irradiation

Micro-manufacturing processes are essential for technological advances in various industries, such as aerospace, automotive, nuclear, biomedicine, and semiconductors. Especially, micro-machining offers advantages in material selection, dimensional accuracy, and complex geometries. However, burr formation in micro-machined titanium alloy components poses significant challenges for medical implant applications, compromising surface quality and biocompatibility. This study presents a hybrid deburring approach combining abrasive process with O 2 plasma large pulsed electron beam (LPEB) irradiation for Ti-6Al-4V micro-channels. Three deburring methods were compared: abrasive, LPEB, and hybrid processing. The hybrid approach achieved superior performance with minimal burr height (16.25 μm) and error area (49.97 μm²), representing 78.26 % and 59.34 % reductions compared to abrasive deburring alone. Surface roughness values of 1.25 μm (top) and 1.12 μm (bottom) were obtained, alongside enhanced hydrophilicity through oxygen vacancy formation and chemical modification. These results demonstrate that LPEB-based hybrid deburring effectively addresses critical requirements for medical implant manufacturing, simultaneously improving geometric accuracy, surface quality, and biocompatibility.