Large‐Area Hydrogenated Amorphous Silicon Schottky Photosensor Arrays for Display Integration

ABSTRACT In this work, a system for the real‐time spatially resolved detection of visible light on a large area is realized on glass. Schottky photodiodes, consisting of hydrogenated amorphous silicon (a‐Si:H) and molybdenum–tantalum (MoTa), are employed as detectors. The detectors exhibit an internal quantum efficiency of up to 70.96% and a response time smaller than 20 μs. The noise equivalent power was measured at 2.424e‐10 W/√Hz. Process compatibility with commonly employed amorphous indium gallium zinc oxide (a‐IGZO) and a‐Si:H thin‐film transistors (TFT) is shown. The driving and real‐time readout of a photosensor array is demonstrated using a microcontroller and a current‐input ADC.