Ångström-scale surface metrology enabled by a compact milliwatt-class HHG source
In this contribution, we demonstrate high-resolution reflection imaging in the extreme ultraviolet spectral range, achieving sub-nanometer scale axial resolution and, at the same time, high imaging throughput enabled by a milliwatt-class HHG source.
Authors
- Jens Limpert (ORCID: https://orcid.org/0000-0001-8349-3530)
- Robert Klas (ORCID: https://orcid.org/0000-0001-5652-5146)
- Jan Rothhardt (ORCID: https://orcid.org/0000-0002-8007-3327)
- Wilhelm Eschen (ORCID: https://orcid.org/0000-0003-3821-3987)
- Daniel S. Penagos Molina (ORCID: https://orcid.org/0000-0003-4329-2421)
- Soo Hoon Chew (ORCID: https://orcid.org/0000-0002-9007-2002)
- Mahmoud Abdelaal
Institutions
- Helmholtz Institute Jena (DE)
- GSI Helmholtz Centre for Heavy Ion Research (DE)
- Fraunhofer Institute for Applied Optics and Precision Engineering (DE)
- Friedrich Schiller University Jena (DE)
Publication Details
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1364/cosi.2025.jm3b.4
- Primary Topic
- Advanced X-ray Imaging Techniques
- Type
- article
- Field-Weighted Citation Impact
- 0.00