Fabrication of dielectric DBR for long-wavelength VCSELs by magnetron sputtering
In order to fabricate dielectric distributed Bragg reflectors (DBRs) with high thermal conductivity and reflectivity, magnetron sputtering of <i>A</i><i>l</i><i>F</i><sub>3</sub>/<i>Z</i><i>n</i><i>S</i> DBR structures was systematically investigated. The fluorine deficiency issue in <i>A</i><i>l</i><i>F</i><sub>3</sub> films was addressed by introducing <i>S</i><i>F</i><sub>6</sub> gas, which significantly improved stoichiometry control. When the <i>S</i><i>F</i><sub>6</sub> flow rate exceeded 9 sccm, <i>A</i><i>l</i><i>F</i><sub>3</sub> films achieved both target stoichiometric ratios and ideal refractive indices. Subsequently, the reflectivity of multilayer DBR combined with a gold layer reached 99%. Finally, lift-off-based patterning enables damage-free mesa definition, demonstrating applicability for long-wavelength vertical-cavity surface emitting lasers.
Authors
- Cong Xiong (ORCID: https://orcid.org/0000-0003-4621-9270)
- Xiaoyu Ma (ORCID: https://orcid.org/0000-0001-8144-0232)
- Yuwei Nie (ORCID: https://orcid.org/0000-0001-6056-5044)
- Yihan Song
- Suping Liu
- Wei Li (ORCID: https://orcid.org/0000-0002-2094-5912)
- Shuo Feng
- Yan Zhan (ORCID: https://orcid.org/0000-0002-1519-486X)
Publication Details
- Journal
- Applied Optics
- Published
- 2025-10-27
- DOI
- https://doi.org/10.1364/ao.576265
- Primary Topic
- Semiconductor Lasers and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00