Accuracy Analysis of Measuring Cylindrical Surfaces with Complex Parameters Using Two-Dimensional Pseudo Lateral Shearing Interferometry

Cylindrical surfaces with complex parameters (CSCP), including off-axis, aspheric, and other properties, constitute fundamental components within complex optical systems. Two-dimensional pseudo lateral shearing interferometry (2DPLSI) is a non-null and generalized method for CSCP. It can eliminate wavefront error of components within systematic and retrace error, thereby achieving high-precision measurement. However, the accuracy of measurement is influenced by factors such as the parameters of the measurement system, rendering the analysis of measurement precision of 2DPLSI to be important. The sources of error in 2DPLSI are discussed in this paper; their effects are simulated using the Monte Carlo (MC) method. Furthermore, a wavefront construction method based on power spectral density (PSD) is proposed, which simulates actual wavefronts more effectively. In addition, experiments are conducted to validate the optimized measurement system parameters derived from the simulation results. Experimental results show that the optimized measurement system parameters effectively improve measurement accuracy, retain low-mid spatial frequency information of wavefront, and eliminate the influence of gridding artifacts.