Laser Ablation Patterning of Metal Thin Films for On-demand of Shadow Mask Patterning in Vacuum Deposition

This study explores the use of laser ablation technology for creating on-demand shadow masks, which are essential in the fabrication of thin film transistor (TFT) devices. Traditional methods for producing shadow masks often encounter significant challenges, such as high costs, lengthy production times, and difficulties in achieving fine, high-resolution patterns. To address these issues, this study introduces a method for manufacturing shadow masks using fiber laser-based laser ablation. Key laser parameters, including frequency and power, were optimized throughout the research. Systematic experimentation revealed that a frequency of 20 kHz and a power output of 14 W enabled the precise and uniform creation of patterns with a 50 μm channel spacing. When these custom shadow masks were employed in the TFT fabrication process, the resulting devices exhibited stable and reliable electrical performance. The findings suggest that laser ablation-based on-demand shadow mask technology offers a cost-effective and flexible solution for producing large-area, high-resolution TFTs. Additionally, this approach significantly reduces the prototyping cycle, making it ideal for rapid development and iterative testing in research and development environments.