Effectiveness of Electromagnetic Shielding in Semiconductor Fab

Electromagnetic interference (EMI) issues in semiconductor Fab have become increasingly critical owing to the progress toward highly integrated processes and advanced technology nodes. However, studies pertaining to EMI mitigation in the microwave-frequency range -remains limited. This study experimentally investigates the attenuation behavior of electromagnetic waves in semiconductor Fabs as a function of distance and proposes shielding design guidelines for each frequency band. Conventional core-based RF solutions and newly developed microwave shielding products are compared in terms of their shielding effectiveness. Subsequently, we propose a comprehensive mitigation strategy that expands chip-level EMI countermeasures to equipment, module, and component levels, thereby minimizing process variation. The results of this study provide foundational data for establishing EMI control standards in semiconductor fabs and are expected to contribute to the development of testing protocols aligned with international standards, such as IEC and CISPR. Furthermore, the proposed EMI attenuation techniques offer scalability to other industries.