Examining the Molecular Composition of Sub‐10‐nm Domains With Nano‐Projectile Secondary Ion Mass Spectrometry
The novel n/q 50 projectile is capable of sampling domains smaller than 10 nm. Each impact is equivalent and thus can be applied to examine the molecular homogeneity of a nonideal surface and examine surface domains that deviate by 2-3 standard deviations from the mean. This makes it an attractive probe for examining novel EUV resists that attempt to produce patterned features below the current 20-nm critical dimension.
Authors
- Jander Cruz
- Michael J. Eller (ORCID: https://orcid.org/0000-0002-9069-2180)
- Michael Shaw (ORCID: https://orcid.org/0009-0001-1585-1380)
- E. A. Schweikert (ORCID: https://orcid.org/0000-0003-3964-7998)
- Dmitriy S. Verkhoturov
- B. Aparicio
- С. В. Верхотуров
Institutions
- California State University, Northridge (US)
- Texas A&M University (US)
Publication Details
- Journal
- Rapid Communications in Mass Spectrometry
- Published
- 2025-10-26
- DOI
- https://doi.org/10.1002/rcm.10162
- Primary Topic
- Ion-surface interactions and analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Semiconductor Research Corporation
- Intel Corporation