Angle-sensitive metamaterial based on one-dimensional electrostatic scanning micro-mirror

Dynamic control of terahertz (THz) waves is crucial for next-generation communication and sensing systems, yet achieving this through angular tuning often requires bulky and complex mechanical setups. A design of angle-sensitive metamaterial (ASM), employing the one-dimensional electrostatic scanning micro-mirror (1D-ESMM) as a tunable platform, which is proposed with dual-resonance at 0.5 THz and 2.26 THz. This integrated platform offers a novel solution for high-speed, dynamic control over the incident angle of the THz wave, achieving a maximum tilt angle of ±26.90°. This angular control enables significant modulation of the ASM's optical response. The reflection can be tuned from 81.9% down to 3.5% by varying the incident angle. Furthermore, the device exhibits polarization-dependent characteristics, allowing it to change between single- and dual-resonance states. These results indicate the potential applications of the proposed design in optical imaging, sensing, detecting and communication systems.