Magnetron Sputtering Preparation of High-Capacity and Long-Life a-SiC Thin-Film Anode and Its Application in Proton Batteries

In the current era of vigorous development of energy technologies, proton batteries have become a research hotspot in the field of energy storage due to their high energy density and long cycle life. The performance of the anode material directly affects the overall performance of proton batteries. This study focuses on magnetron sputtering technology to prepare a-SiC thin-film anode materials for proton batteries. By precisely controlling the ratio of Si to C, the influence of this ratio on the electrochemical performance of the thin films was systematically and deeply investigated. After continuous exploration and optimization of process parameters, a-SiC thin films with excellent performance were successfully prepared. Among them, the a-Si0.9C0.1 thin-film anode material stands out, demonstrating remarkable electrochemical performance. Its initial discharge capacity is as high as 1758 mAh g–1, and after 2000 cycles at a high discharge current density of 2 A g–1, the capacity remains at 1502 mAh g–1, with a capacity retention rate of 87%. This achievement not only provides theoretical guidance for the optimization design of anode materials for proton batteries and important references for further improving material performance but also offers strong technical support for the wide application of magnetron sputtering technology in the field of energy storage materials.