Effect of the Laser Cutting Speed on the Cut Surface Structure of Silicon Nitride-Based Ceramics

Abstract—The processes that occur in silicon nitride-based ceramic materials under ytterbium laser radiation are investigated. The effect of laser processing speed in the range 5–15 mm/s on the microstructure and phase composition of the cut surface is studied. The formation of a defective layer is shown to be affected by the thermal decomposition of the ceramics and the melting and oxidation of the reaction products. The best surface quality is achieved at a laser processing speed of 5 mm/s.